MEMS based micromirror device for optical add/drop module

J. C. Chiou*, Y. C. Lin, Shuen-De Wu, S. H. Lin

*此作品的通信作者

研究成果: 雜誌貢獻會議論文同行評審

2 引文 斯高帕斯(Scopus)

摘要

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

原文英語
頁(從 - 到)82-88
頁數7
期刊Proceedings of SPIE - The International Society for Optical Engineering
4593
DOIs
出版狀態已發佈 - 2001 十二月 1
事件Design, Chararacterization, and Packaging for MEMS and Microelectronics II - Adelaide, 澳大利亚
持續時間: 2001 十二月 172001 十二月 19

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

指紋

深入研究「MEMS based micromirror device for optical add/drop module」主題。共同形成了獨特的指紋。

引用此