Low-Frequency Compensation of Piezoelectric Accelerometers for Motion Control Systems

This paper describes how piezoelectric accelerometers can be applied to motion control systems for performance enhancements. Piezoelectric accelerometers are known for their wide frequency ranges to sense dynamic acceleration. However, they are unable to measure static and quasi-static acceleration. Since positional sensors generally exist in motion control systems, this paper presents two acceleration observers that fuse piezoelectric accelerometers and positional sensors and are able to achieve high-quality observation of acceleration, including static and quasi-static components. The proposed observers are applied to a robotic manipulator, and experimental results confirm feasibility and effectiveness of the proposed acceleration observers.