Low-capacitance SCR with waffle layout structure for on-chip ESD protection in RF ICs

Ming Dou Ker*, Chun Yu Lin


研究成果: 雜誌貢獻期刊論文同行評審

37 引文 斯高帕斯(Scopus)


The silicon-controlled rectifier (SCR) has been used as an effective on-chip electrostatic discharge (ESD) protection device in CMOS technology due to the highest ESD robustness in nanoscale integrated circuits (ICs). In this study, the SCR realized in a waffle layout structure is proposed to improve ESD current distribution efficiency for ESD protection and to reduce the parasitic capacitance. The waffle layout structure of the SCR can achieve smaller parasitic capacitance under the same ESD robustness. With smaller parasitic capacitance, the degradation on RF circuit performance due to ESD protection devices can be reduced. The proposed waffle SCR with low parasitic capacitance is suitable for on-chip ESD protection in RF ICs. Besides, the desired current to trigger on the SCR device with a waffle layout structure and its turn-on time has also been investigated in a silicon chip.

頁(從 - 到)1286-1294
期刊IEEE Transactions on Microwave Theory and Techniques
出版狀態已發佈 - 2008 5月

ASJC Scopus subject areas

  • 輻射
  • 凝聚態物理學
  • 電氣與電子工程


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