Laser interference lithography and nano-imprint techniques for lower reflection transparent conducting oxide hybrid films

Ta Hsin Chou, Kuei Yuan Cheng, Chih Chieh Su, Tien Li Chang, Chih Wei Hsieh, Jen Hui Tsai

研究成果: 雜誌貢獻期刊論文同行評審

8 引文 斯高帕斯(Scopus)

摘要

The transparent conducting oxide (TCO) film is a significant component in flat panel display industry, applied for flexible display, e-paper, and touch panel. The TCO materials have high refractive index, so the phenomenon of high reflectance is the major issue and needs solved in present and future market. In this study, the structure and process of new lower reflection TCO hybrid film is introduced. The laser interference lithography and UV nanoimprint are combined for fabrication of sub-wavelength structures on PET film, then the tin-doped indium oxide (ITO) deposited on structures. Finally, the best result of this hybrid film is reflectance reduced to 3.3% at wavelength 550nm, just 13% of the original film, and the resistance of ITO layer is 1.05x10-3 Ω-cm. This result is useful for the TCO film applied in low reflection demand products in the future.

原文英語
頁(從 - 到)619-622
頁數4
期刊International Journal of Precision Engineering and Manufacturing
11
發行號4
DOIs
出版狀態已發佈 - 2010 八月
對外發佈Yes

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

指紋 深入研究「Laser interference lithography and nano-imprint techniques for lower reflection transparent conducting oxide hybrid films」主題。共同形成了獨特的指紋。

引用此