Iterative learning control of a piezo-actuated positioning stage for micro/nano manipulation

Chih Jer Lin, Chih Keng Chen, Chun Ta Chen

研究成果: 書貢獻/報告類型會議貢獻

摘要

The main objective of this investigation is to improve the tracking accuracy of a piezo-actuated positioning stage using an iterative learning control. First, to compensate for the tracking error of the piezo-actuated positioning stage that is caused by nonlinear hysteresis, the dynamics of the hysteresis is modeled using the Bouc-Wen model. The particle swarm optimization (PSO) is used to determine the parameters of the inverse-hysteresis model. Second, the design of an iterative learning control is presented. Based on the simulation, the appropriate value of the learning rate is determined. Finally, the efficacy of the approach is demonstrated to achieve high accuracy positioning via the real-time experiments. The experimental result of the piezo-actuated positioning stage is measured by the laser interferometer (HP-5529A). The experimental results show that the iterative learning control can compensate the hysteresis-caused tracking error and the positional accuracy of better than 100 nano-meter is readily achieved.

原文英語
主出版物標題Innovation for Applied Science and Technology
頁面2080-2084
頁數5
DOIs
出版狀態已發佈 - 2013 二月 20
事件2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, 臺灣
持續時間: 2012 十一月 22012 十一月 6

出版系列

名字Applied Mechanics and Materials
284-287
ISSN(列印)1660-9336
ISSN(電子)1662-7482

其他

其他2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
國家臺灣
城市Kaohsiung
期間12/11/212/11/6

ASJC Scopus subject areas

  • Engineering(all)

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  • 引用此

    Lin, C. J., Chen, C. K., & Chen, C. T. (2013). Iterative learning control of a piezo-actuated positioning stage for micro/nano manipulation. 於 Innovation for Applied Science and Technology (頁 2080-2084). (Applied Mechanics and Materials; 卷 284-287). https://doi.org/10.4028/www.scientific.net/AMM.284-287.2080