Investigate the characteristics of 0.65(K0.5Bi0.5TiO3)-0.35BaTiO3 films at various deposition temperatures

W. C. Tzou, C. G. Kuo, P. S. Cheng, Y. H. Lin, C. F. Yang

研究成果: 書貢獻/報告類型會議論文篇章

摘要

0.65(K0.5Bi0.5)TiO3-0.35BaTiO3 (KBT-BT3) ceramics were synthesized using a two-step calcination process that combined hydrothermal and conventional calcination processes. After sintered into ceramic target, KBT-BT3 films were deposited on Pt/Ti/Si and SiO2/Si/Al substrates by radio frequency magnetron (RF) sputtering at various temperatures. The surface morphologies and thicknesses of KBT-BT3 films were characterized by field emission scanning electron microscopy, and the thickness increased with increasing deposition temperature. XRD patterns showed that all KBT-BT3 films were amorphous and higher deposition temperature had no apparent effects to improve the crystalline orientation. The effects of deposition temperatures on the properties of the current-electric filed, polarization-applied electric field, and capacitance- voltage curves were also investigated. As deposition temperatures of KBT-BT3 films increased from room temperature to 400°C, the leakage current density had no apparent variation but the threshold voltage was shifted to lower value. The theorems for the effects of deposition temperature on the properties of KBT-BT3 films were also investigated.

原文英語
主出版物標題Metallurgy Technology and Materials II
頁面372-376
頁數5
DOIs
出版狀態已發佈 - 2013
事件2nd International Conference on Metallurgy Technology and Materials, ICMTM 2013 - Hong Kong, 中国
持續時間: 2013 六月 252013 六月 26

出版系列

名字Advanced Materials Research
813
ISSN(列印)1022-6680

其他

其他2nd International Conference on Metallurgy Technology and Materials, ICMTM 2013
國家/地區中国
城市Hong Kong
期間2013/06/252013/06/26

ASJC Scopus subject areas

  • 工程 (全部)

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