Integration of capacitive and piezoelectric accelerometers using a digital approach

Yu Sheng Lu*, Po Chen Lee

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

摘要

This study is to obtain an acceleration signal with a nice quality and apply it to a linear motion stage. The accelerometers used in this paper are piezoelectric and capacitive accelerometers. Since a piezoelectric accelerometer cannot measure low-frequency acceleration, its application to servo systems is limited. On the contrary, a capacitive accelerometer is able to measure low-frequency acceleration. However, its output noise is significant, and its dynamic bandwidth is small compared with the piezoelectric accelerometer. This paper proposes a high-performance accelerometer, which digitally integrates the salient features of both capacitive and piezoelectric accelerometers. The proposed accelerometer can measure both low- and high- frequency acceleration. It is also applied to compensating for load disturbance in a linear drive for performance improvement.

原文英語
頁(從 - 到)346-351
頁數6
期刊International Journal of Electrical and Electronic Engineering and Telecommunications
8
發行號6
DOIs
出版狀態已發佈 - 2019 十一月 1

ASJC Scopus subject areas

  • 儀器
  • 電腦網路與通信
  • 電氣與電子工程

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