Integrated design of a planar Maglev system for micro positioning

According to what the 6-DOF magnetic levitation system has proposed at last year. In the continuous work, this research desire to upgrade positioning precision. The re-design concept attempts to keep the good performance in the whole journey of moving rather than the point-to-point positioning precision. Based on these concepts, the force model was modified in considering the variation from the displacement to the magnetic forces first, and avoids the constraint of the attractive levitation in replacing the repulsive levitation. Finally, the concept of relative place to build the measuring system was adopted. All of the performance of the improved framework will be demonstrated in the experimental results.