In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

C. L. Cheng, C. T. Chia, C. C. Chiu, C. C. Wu, H. F. Cheng, I. N. Lin

研究成果: 雜誌貢獻文章

5 引文 斯高帕斯(Scopus)

摘要

Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

原文英語
頁(從 - 到)251-256
頁數6
期刊Applied Surface Science
174
發行號3-4
DOIs
出版狀態已發佈 - 2001 四月 30

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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