Improvement on Ferroelectricity and Endurance of Ultra-Thin HfZrO2 Capacitor with Molybdenum Capping Electrode

K. T. Chen, C. Y. Liao, C. Lo, H. Y. Chen, G. Y. Siang, S. Liu, S. C. Chang, M. H. Liao, S. T. Chang, M. H. Lee

研究成果: 書貢獻/報告類型會議貢獻

3 引文 斯高帕斯(Scopus)

指紋 深入研究「Improvement on Ferroelectricity and Endurance of Ultra-Thin HfZrO<sub>2</sub> Capacitor with Molybdenum Capping Electrode」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy