Improvement on Ferroelectricity and Endurance of Ultra-Thin HfZrO2 Capacitor with Molybdenum Capping Electrode

K. T. Chen, C. Y. Liao, C. Lo, H. Y. Chen, G. Y. Siang, S. Liu, S. C. Chang, M. H. Liao, S. T. Chang, M. H. Lee

研究成果: 書貢獻/報告類型會議貢獻

2 引文 斯高帕斯(Scopus)

摘要

The capping metal plays an important role on HfZrO2 (HZO) crystallization for ferroelectric phase. The Mo top electrode MIM capacitor is demonstrated with high remnant polarization and endurance as compared with TaN electrode. The optimized data retention for 500°C annealing device presents (>30) μC/cm2 up to 2×104 sec and slightly degradation extrapolated to 3×108 sec (10 years). The Mo electrode exhibits higher 2Pr and excellent endurance performance ((>10)5 cycles) as compared with that of TaN electrode. It is beneficial for promising ultra-thin FE-HZO as the guidelines for low-power CMOS/memory applications.

原文英語
主出版物標題2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
發行者Institute of Electrical and Electronics Engineers Inc.
頁面62-64
頁數3
ISBN(電子)9781538665084
DOIs
出版狀態已發佈 - 2019 三月
事件2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 - Singapore, 新加坡
持續時間: 2019 三月 122019 三月 15

出版系列

名字2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019

會議

會議2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
國家新加坡
城市Singapore
期間19/3/1219/3/15

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Hardware and Architecture

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    Chen, K. T., Liao, C. Y., Lo, C., Chen, H. Y., Siang, G. Y., Liu, S., Chang, S. C., Liao, M. H., Chang, S. T., & Lee, M. H. (2019). Improvement on Ferroelectricity and Endurance of Ultra-Thin HfZrO2 Capacitor with Molybdenum Capping Electrode. 於 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 (頁 62-64). [8731272] (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM.2019.8731272