Implementation process of a reflective-type electrical tunable SOI optical filter

Shyh Lin Tsao, Shu-Fen Hu, Jiang Hung Tien, Chun Wei Tsai

研究成果: 書貢獻/報告類型會議貢獻

摘要

In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.

原文英語
主出版物標題CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
主出版物子標題Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁數1
ISBN(電子)0780377664
DOIs
出版狀態已發佈 - 2003 一月 1
事件5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, 臺灣
持續時間: 2003 十二月 152003 十二月 19

出版系列

名字Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
1

其他

其他5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
國家臺灣
城市Taipei
期間03/12/1503/12/19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • 引用此

    Tsao, S. L., Hu, S-F., Tien, J. H., & Tsai, C. W. (2003). Implementation process of a reflective-type electrical tunable SOI optical filter. 於 CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1274739] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 卷 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274739