Impact of stress and doping effects on the polarization behavior and electrical characteristics of hafnium–zirconium oxides

In this study, we investigated the stress and doping effects of ferroelectric hafnium zirconium oxide (HfZrO) based on material analysis and electrical characteristics. The experimental results revealed that the ferroelectric crystalline phase is effectively transferred by mechanical stress of tantalum nitride (TaN) electrodes, and the origin of stress is mainly the thermal residual stress formed near the TaN and HfZrO interface. The ferroelectric polarization characteristics of HfZrO can be further modified by additional Al doping, which not only improves the leakage current of HfZrO due to the large bandgap of Al₂O₃ but also simultaneously stabilizes the ferroelectric domain switching under a large coercive field.