Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition

C. L. Cheng*, C. T. Chia, C. C. Chiu, C. C. Wu, I. N. Lin

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

22 引文 斯高帕斯(Scopus)

摘要

This work utilizes Raman spectroscopy to examine the thermal annealing of diamond-like carbon (DLC) films produced by pulsed laser deposition (PLD). Post-production modification of DLC films by atomic hydrogen etching reveals distinct results and is observed for the first time. Both ex-situ and in-situ thermal annealing and annealing with atomic hydrogen on the as-prepared DLC samples are compared herein. The Raman spectra reveal that the typical D- and G-bands evolve from unresolved to well separated above 400°C as the temperature increases from room temperature to 700°C. Atomic hydrogen enhances the annealing process at temperatures above 500°C. Thermal annealing transforms the DLC films into graphitic structures while atomic hydrogen etches away the disordered carbons according to both the ex-situ and in-situ Raman spectra.

原文英語
頁(從 - 到)970-975
頁數6
期刊Diamond and Related Materials
10
發行號3-7
DOIs
出版狀態已發佈 - 2001 三月

ASJC Scopus subject areas

  • 電子、光磁材料
  • 化學 (全部)
  • 機械工業
  • 材料化學
  • 電氣與電子工程

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