Hot carrier reliability of ald HfSiON gated MOSFETs with different compositions

H. W. Chen, S. Y. Chen, C. C. Lu, C. H. Liu, F. C. Chiu, Z. Y. Hsieh, H. S. Huang, L. W. Cheng, C. T. Lin, G. H. Ma, S. W. Sun

研究成果: 書貢獻/報告類型會議論文篇章

指紋

深入研究「Hot carrier reliability of ald HfSiON gated MOSFETs with different compositions」主題。共同形成了獨特的指紋。

INIS

Engineering

Material Science