High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

K. C. Chiang; Albert Chin; C. H. Cheng; C. P. Chou; H. C. Pan; C. N. Hsiao; H. L. Hwang

doi:10.1109/LED.2007.891265

High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

K. C. Chiang
, Albert Chin
, C. H. Cheng
, C. P. Chou
, H. C. Pan
, C. N. Hsiao
, H. L. Hwang

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

53 引文斯高帕斯（Scopus）

摘要

Using low-cost and high work-function Ni, a low leakage current of 5 x 10^–6 A/cm² at 125 °C is obtained in a high 25-fF/μm² -density SrTiO₃ metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.

原文	英語
頁（從 - 到）	235-237
頁數	3
期刊	IEEE Electron Device Letters
卷	28
發行號	3
DOIs	https://doi.org/10.1109/LED.2007.891265
出版狀態	已發佈 - 2007 3月 7
對外發佈	是

ASJC Scopus subject areas

電子、光磁材料
電氣與電子工程

存取文件

10.1109/LED.2007.891265

其它文件與鏈接

引用此

@article{293521a1daca450f9b3830c1c0fd7d14,

title = "High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning",

abstract = "Using low-cost and high work-function Ni, a low leakage current of 5 x 10–6 A/cm2 at 125 °C is obtained in a high 25-fF/μm2 -density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.",

keywords = "Capacitor, Ni, high temperature, metal-insulator-metal (MIM), thermal leakage",

author = "Chiang, \{K. C.\} and Albert Chin and Cheng, \{C. H.\} and Chou, \{C. P.\} and Pan, \{H. C.\} and Hsiao, \{C. N.\} and Hwang, \{H. L.\}",

year = "2007",

month = mar,

day = "7",

doi = "10.1109/LED.2007.891265",

language = "English",

volume = "28",

pages = "235--237",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

}

TY - JOUR

T1 - High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

AU - Chiang, K. C.

AU - Chin, Albert

AU - Cheng, C. H.

AU - Chou, C. P.

AU - Pan, H. C.

AU - Hsiao, C. N.

AU - Hwang, H. L.

PY - 2007/3/7

Y1 - 2007/3/7

N2 - Using low-cost and high work-function Ni, a low leakage current of 5 x 10–6 A/cm2 at 125 °C is obtained in a high 25-fF/μm2 -density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.

AB - Using low-cost and high work-function Ni, a low leakage current of 5 x 10–6 A/cm2 at 125 °C is obtained in a high 25-fF/μm2 -density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.

KW - Capacitor

KW - Ni

KW - high temperature

KW - metal-insulator-metal (MIM)

KW - thermal leakage

UR - https://www.scopus.com/pages/publications/85008035323

UR - https://www.scopus.com/pages/publications/85008035323#tab=citedBy

U2 - 10.1109/LED.2007.891265

DO - 10.1109/LED.2007.891265

M3 - Article

AN - SCOPUS:85008035323

SN - 0741-3106

VL - 28

SP - 235

EP - 237

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 3

ER -

High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

摘要

ASJC Scopus subject areas

存取文件

其它文件與鏈接

指紋

引用此