摘要
Using low-cost and high work-function Ni, a low leakage current of 5 x 10–6 A/cm2 at 125 °C is obtained in a high 25-fF/μm2 -density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.
原文 | 英語 |
---|---|
頁(從 - 到) | 235-237 |
頁數 | 3 |
期刊 | IEEE Electron Device Letters |
卷 | 28 |
發行號 | 3 |
DOIs | |
出版狀態 | 已發佈 - 2007 3月 7 |
對外發佈 | 是 |
ASJC Scopus subject areas
- 電子、光磁材料
- 電氣與電子工程