High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

K. C. Chiang; Albert Chin; C. H. Cheng; C. P. Chou; H. C. Pan; C. N. Hsiao; H. L. Hwang

doi:10.1109/LED.2007.891265

High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

K. C. Chiang, Albert Chin, C. H. Cheng, C. P. Chou, H. C. Pan, C. N. Hsiao, H. L. Hwang

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

44 引文斯高帕斯（Scopus）

摘要

Using low-cost and high work-function Ni, a low leakage current of 5 x 10^–6 A/cm² at 125 °C is obtained in a high 25-fF/μm² -density SrTiO₃ metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.

原文	英語
頁（從 - 到）	235-237
頁數	3
期刊	IEEE Electron Device Letters
卷	28
發行號	3
DOIs	https://doi.org/10.1109/LED.2007.891265
出版狀態	已發佈 - 2007 3月 7
對外發佈	是

ASJC Scopus subject areas

電子、光磁材料
電氣與電子工程

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10.1109/LED.2007.891265

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abstract = "Using low-cost and high work-function Ni, a low leakage current of 5 x 10–6 A/cm2 at 125 °C is obtained in a high 25-fF/μm2 -density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.",

keywords = "Capacitor, Ni, high temperature, metal-insulator-metal (MIM), thermal leakage",

author = "Chiang, {K. C.} and Albert Chin and Cheng, {C. H.} and Chou, {C. P.} and Pan, {H. C.} and Hsiao, {C. N.} and Hwang, {H. L.}",

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AU - Chou, C. P.

AU - Pan, H. C.

AU - Hsiao, C. N.

AU - Hwang, H. L.

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N2 - Using low-cost and high work-function Ni, a low leakage current of 5 x 10–6 A/cm2 at 125 °C is obtained in a high 25-fF/μm2 -density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.

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KW - Capacitor

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KW - high temperature

KW - metal-insulator-metal (MIM)

KW - thermal leakage

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High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

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