High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

K. C. Chiang, Albert Chin, C. H. Cheng, C. P. Chou, H. C. Pan, C. N. Hsiao, H. L. Hwang

研究成果: 雜誌貢獻期刊論文同行評審

51 引文 斯高帕斯(Scopus)

摘要

Using low-cost and high work-function Ni, a low leakage current of 5 x 10–6 A/cm2 at 125 °C is obtained in a high 25-fF/μm2 -density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 °C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall κ value beyond previous laminate structure.

原文英語
頁(從 - 到)235-237
頁數3
期刊IEEE Electron Device Letters
28
發行號3
DOIs
出版狀態已發佈 - 2007 三月 7
對外發佈

ASJC Scopus subject areas

  • 電子、光磁材料
  • 電氣與電子工程

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