@inproceedings{09016f25855d4ee7bc0a12f5e62f8ef8,
title = "High sensitivity three-stage microfabricated preconcentrator-focuser for micro gas chromatography",
abstract = "The results of a high sensitivity three-stage microfabricated preconcentrator-focuser (μPCF) for a micro gas chromatograph (μGC) that can provide real-time monitoring for a quantification and identification analysis of complex organic vapor mixtures are presented. The device consists of a thick Si microheater loaded with graphitized carbon adsorbents and sealed with a Si micromachined cover plate. This three-stage device has effectively extended the detection range of the compounds to cover up to four orders of magnitude in volatility. In addition, the dead volume, thermal mass, heating efficiency, and pressure drop of the single-stage μPCF are improved significantly in the three-stage μPCF and thus increase the device performance substantially. We demonstrate that thirty common organic vapors are well separated and desorption peak widths are all within 2.05 s.",
keywords = "Design optimization, Energy consumption, Gas chromatography, Laboratories, Micromachining, Monitoring, Prototypes, Space heating, Volatile organic compounds, Wireless sensor networks",
author = "Tian, \{W. C.\} and Chan, \{H. K.L.\} and Pang, \{S. W.\} and Lu, \{C. J.\} and Zellers, \{E. T.\}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215270",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "131--134",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}