Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method

Wei Fan Hsu, Chin Guo Kuo, Yi Chieh Chao, Jeen Fong Lee, Cheng Fu Yang, Feng Renn Juang

研究成果: 書貢獻/報告類型會議貢獻

2 引文 斯高帕斯(Scopus)

摘要

In this study, we would show the details of a new fabricating process for the grown of the ZnO nano-wire arrays. The anodic aluminum oxide (AAO) was used as template and atomic-layer deposition (ALD) method was used to deposit ZnO thin films on AAO template. Because the ALD method can deposit the thin films with high aspect ratio, for that the ZnO particles are hoped to fill into the AAO tubes to form the ZnO nano-wires. The ZnO residual on the surfaces of AAO template was etched by using HCl solution (0.2328M or 0.1164M). The AAO template was removed by using NaOH solution (0.5M, 0.1M), then the ZnO nano-wire arrays were obtained.

原文英語
主出版物標題2016 International Conference on Applied System Innovation, IEEE ICASI 2016
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781467398886
DOIs
出版狀態已發佈 - 2016 八月 10
事件2016 International Conference on Applied System Innovation, IEEE ICASI 2016 - Ginowan City Okinawa, 日本
持續時間: 2016 五月 282016 六月 1

出版系列

名字2016 International Conference on Applied System Innovation, IEEE ICASI 2016

其他

其他2016 International Conference on Applied System Innovation, IEEE ICASI 2016
國家日本
城市Ginowan City Okinawa
期間16/5/2816/6/1

    指紋

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Computer Science Applications
  • Control and Systems Engineering
  • Social Sciences (miscellaneous)
  • Business, Management and Accounting (miscellaneous)
  • Electrical and Electronic Engineering
  • Control and Optimization

引用此

Hsu, W. F., Kuo, C. G., Chao, Y. C., Lee, J. F., Yang, C. F., & Juang, F. R. (2016). Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method. 於 2016 International Conference on Applied System Innovation, IEEE ICASI 2016 [7539895] (2016 International Conference on Applied System Innovation, IEEE ICASI 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICASI.2016.7539895