Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang; Y. L. Ding; M. H. Chou; H. E. Horng

doi:10.1016/0921-4534(91)91115-K

Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang, Y. L. Ding, M. H. Chou, H. E. Horng

光電工程學士學位學程

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

1 引文斯高帕斯（Scopus）

摘要

We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-T_c YBa₂Cu₃O_7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

原文	英語
頁（從 - 到）	1981-1982
頁數	2
期刊	Physica C: Superconductivity and its applications
卷	185-189
發行號	PART 3
DOIs	https://doi.org/10.1016/0921-4534(91)91115-K
出版狀態	已發佈 - 1991 12月 1

ASJC Scopus subject areas

電子、光磁材料
凝聚態物理學
能源工程與電力技術
電氣與電子工程

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10.1016/0921-4534(91)91115-K

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title = "Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique",

abstract = "We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.",

author = "Yang, {H. C.} and Ding, {Y. L.} and Chou, {M. H.} and Horng, {H. E.}",

note = "Funding Information: This work was supported by the Na tional Science Council of R.O.C. under contract No. NSC79-0208-M002-38.",

year = "1991",

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doi = "10.1016/0921-4534(91)91115-K",

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AU - Yang, H. C.

AU - Ding, Y. L.

AU - Chou, M. H.

AU - Horng, H. E.

N1 - Funding Information: This work was supported by the Na tional Science Council of R.O.C. under contract No. NSC79-0208-M002-38.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

AB - We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

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U2 - 10.1016/0921-4534(91)91115-K

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SN - 0921-4534

VL - 185-189

SP - 1981

EP - 1982

JO - Physica C: Superconductivity and its applications

JF - Physica C: Superconductivity and its applications

IS - PART 3

ER -

Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

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