Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang, Y. L. Ding, M. H. Chou, H. E. Horng

研究成果: 雜誌貢獻期刊論文同行評審

1 引文 斯高帕斯(Scopus)

摘要

We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

原文英語
頁(從 - 到)1981-1982
頁數2
期刊Physica C: Superconductivity and its applications
185-189
發行號PART 3
DOIs
出版狀態已發佈 - 1991 十二月 1

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 能源工程與電力技術
  • 電氣與電子工程

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