Growth of high-Tc YBa2Cu3Oy films with an off-axis sputtering configuration

L. M. Wang*, H. H. Sung, J. H. Chern, H. C. Yang, H. E. Horng


研究成果: 雜誌貢獻期刊論文同行評審

7 引文 斯高帕斯(Scopus)


Using an off-axis rf sputtering configuration, we have prepared in situ high-Tc YBa2Cu3O7-y (YBCO) films with a relatively large deposition rate. The sputtering gas was a mixture of Ar and O2 (7:3) and the substrates were MgO(100) and SrTiO 3(100). We found that the distance from the target to the substrate, d, is a key factor in the deposition rate. By decreasing d to a value of about 1.5-2.5 cm, we obtained a deposition rate as great as 2000-2500 Å per hour with an rf power of 120 W and at a total pressure 100-200 mTorr. The transport behaviors of the as-grown YBCO films under magnetic fields are reported. The activation energy derived from the resistive transition in magnetic fields is thickness dependent.

頁(從 - 到)8419-8422
期刊Journal of Applied Physics
出版狀態已發佈 - 1993

ASJC Scopus subject areas

  • 物理與天文學 (全部)


深入研究「Growth of high-Tc YBa2Cu3Oy films with an off-axis sputtering configuration」主題。共同形成了獨特的指紋。