Growth and characterization of La_0.7Sr_0.3MnO ₃ films on various substrates

The manganite La_0.7Sr_0.3MnO₃ (LSMO) films are deposited on various substrates, such as single crystal LaAlO ₃(001), SrTiO₃(001), MgO(001), SiO₂/Si(001) and amorphous quartz, by using a magnetron DC sputtering system. According to the X-ray diffraction patterns, either the c-axis oriented or the polycrystalline LSMO films are obtained as the LSMO films are deposited on these substrates, depending on the lattice mismatch between the LSMO and the substrates. The c-axis oriented LSMO films exhibit typical transport properties, whereas the polycrystalline LSMO films show significantly different behaviors of the temperature-dependent resistance, and the magnetoresistance. This work provides characterizations of the LSMO films on several substrates for further applications integrated with other thin-film devices which are grown on different substrates.