Gas field ion source from an IrW 〈111〉 single-atom tip

Hong Shi Kuo, Ing Shouh Hwang, Tsu Yi Fu, Yi Hsien Lu, Chun Yueh Lin, Tien T. Tsong

研究成果: 雜誌貢獻文章

43 引文 斯高帕斯(Scopus)

摘要

We show that a thermally stable IrW 〈111〉 single-atom tip is a very good point ion source for rare gases (He, Ar) and reactive gases (H2, O2). The ion beams are emitted from the topmost atom with a very small opening angle (<1°) and, most importantly, they exhibit high brightness. In addition, the ion currents are very stable. These good properties together with the long lifetime of the tip and the reliable tip preparation method make this tip especially suitable for applications in gas field ion source focused ion beam systems.

原文英語
文章編號063106
期刊Applied Physics Letters
92
發行號6
DOIs
出版狀態已發佈 - 2008 二月 22

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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