Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Rih Sheng Jian, Tse Yu Wang, Lung Yu Song, Chun Yen Kuo, Wei Cheng Tian, Ei Wen Lo, Chia Jung Lu*

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

16 引文 斯高帕斯(Scopus)

摘要

Volatile organic compounds (VOCs) inside a semiconductor cleanroom and the concentration changes with indoor process activities are investigated. The species of volatile organic compounds (VOCs) were identified using canister/GC-MS analyses. The persistent existing VOCs inside the cleanroom of a field study included acetone, isopropanol, n-hexane, toluene, m-xylene, and anisole. A micro gas chromatograph (μGC) equipped with a high-ratio mini-preconcentrator and a photo-ionization detector was tuned for the onsite analysis for these target VOCs. As the use of isopropyl alcohol and acetone occurred at different times, the concentrations of these two chemicals surged to hundreds of ppb and were recorded by the μGC in a real-time manner. In addition, the time-dependent concentration of n-hexane was found to be highly correlated to isopropanol. The rapid establishment of a large amount of data for individual VOCs enabled the observation of activity related changes for these chemicals inside a cleanroom.

原文英語
頁(從 - 到)287-295
頁數9
期刊Building and Environment
94
發行號P1
DOIs
出版狀態已發佈 - 2015 12月 1

ASJC Scopus subject areas

  • 環境工程
  • 土木與結構工程
  • 地理、規劃與發展
  • 建築與營造

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