@article{609782a80dae4f61ac4eb15fb72472da,
title = "Ferroelectric HfZrO2 FETs for steep switch onset",
abstract = "The ferroelectric HfZrO2 (HZO) is focused on coercive voltage for onset of negative capacitance (NC) with sub-2.3kbT/q subthreshold swing (SS). The Fe-FETs with ultra-thin HZO (<10 nm) is experimentally obtained gradual transition on SS and VT shift on annealing temperatures and sweep ranges. The polarization hysteresis of metal/ferroelectric/metal (MFM) is employed to match FET load line and balances the charge from positive capacitance (PC) to NC with increasing applied bias. The adjustment for charge of FET load line to reduce NC onset voltage is discussed. The feasible concept of coupling the ferroelectric Hf-based oxide is practicable to following current CMOS architectures.",
keywords = "Fe-FETs, HZO, Negative capacitance, Onset voltage",
author = "Chen, {K. T.} and Liao, {C. Y.} and Chen, {H. Y.} and C. Lo and Siang, {G. Y.} and Lin, {Y. Y.} and Tseng, {Y. J.} and C. Chang and Chueh, {C. Y.} and Yang, {Y. J.} and Liao, {M. H.} and Li, {K. S.} and Chang, {S. T.} and Lee, {M. H.}",
note = "Funding Information: This work is supported in part by the Ministry of Science and Technology (MOST) under Grants 107-2218-E-003-004 and 107-2622-8-002-018. The device processing is supported by the Taiwan Semiconductor Research Institute (TSRI), and computing is supported by the National Center for High-Performance Computing (NCHC), Taiwan. Funding Information: This work is supported in part by the Ministry of Science and Technology (MOST) under Grants 107-2218-E-003-004 and 107-2622-8-002-018 . The device processing is supported by the Taiwan Semiconductor Research Institute (TSRI), and computing is supported by the National Center for High-Performance Computing (NCHC), Taiwan. Publisher Copyright: {\textcopyright} 2019 Elsevier B.V.",
year = "2019",
month = jul,
day = "15",
doi = "10.1016/j.mee.2019.110991",
language = "English",
volume = "215",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
}