Ferroelectric HfZrO2 FETs for steep switch onset

K. T. Chen, C. Y. Liao, H. Y. Chen, C. Lo, G. Y. Siang, Y. Y. Lin, Y. J. Tseng, C. Chang, C. Y. Chueh, Y. J. Yang, M. H. Liao, K. S. Li, S. T. Chang, M. H. Lee*


研究成果: 雜誌貢獻期刊論文同行評審

6 引文 斯高帕斯(Scopus)


The ferroelectric HfZrO2 (HZO) is focused on coercive voltage for onset of negative capacitance (NC) with sub-2.3kbT/q subthreshold swing (SS). The Fe-FETs with ultra-thin HZO (<10 nm) is experimentally obtained gradual transition on SS and VT shift on annealing temperatures and sweep ranges. The polarization hysteresis of metal/ferroelectric/metal (MFM) is employed to match FET load line and balances the charge from positive capacitance (PC) to NC with increasing applied bias. The adjustment for charge of FET load line to reduce NC onset voltage is discussed. The feasible concept of coupling the ferroelectric Hf-based oxide is practicable to following current CMOS architectures.

期刊Microelectronic Engineering
出版狀態已發佈 - 2019 7月 15

ASJC Scopus subject areas

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 電氣與電子工程


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