Ferroelectric characterization of hafnium-oxide-based ferroelectric memories with remote nitrogen plasma treatments

You Ting Lee, Hsuan Han Chen, Yi Chun Tung, Bing Yang Shih, Szu Yen Hsiung, Tsung Ming Lee, Chih Chieh Hsu, Chien Liu, Hsiao Hsuan Hsu, Chun Yen Chang, Yu Pin Lan, Chun Hu Cheng

研究成果: 書貢獻/報告類型會議論文篇章

指紋

深入研究「Ferroelectric characterization of hafnium-oxide-based ferroelectric memories with remote nitrogen plasma treatments」主題。共同形成了獨特的指紋。

Physics

INIS