Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai; N. F. Chiu; P. C. Liu; Y. C. Ou; H. H. Liao; Y. J. Yang; L. J. Yang; U. Lei; F. S. Chao; S. S. Lu; C. W. Lin; P. Z. Chang; W. P. Shih

doi:10.1109/MEMSYS.2009.4805354

Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai^*
, N. F. Chiu
, P. C. Liu
, Y. C. Ou
, H. H. Liao
, Y. J. Yang
, L. J. Yang
, U. Lei
, F. S. Chao
, S. S. Lu
, C. W. Lin
, P. Z. Chang
, W. P. Shih

^*此作品的通信作者

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

6 引文斯高帕斯（Scopus）

摘要

This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

原文	英語
文章編號	4805354
頁（從 - 到）	204-207
頁數	4
期刊	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805354
出版狀態	已發佈 - 2009
對外發佈	是
事件	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, 意大利持續時間: 2009 1月 25 → 2009 1月 29

ASJC Scopus subject areas

電子、光磁材料
凝聚態物理學
機械工業
電氣與電子工程

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10.1109/MEMSYS.2009.4805354

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Tsai, Y. C., Chiu, N. F., Liu, P. C., Ou, Y. C., Liao, H. H., Yang, Y. J., Yang, L. J., Lei, U., Chao, F. S., Lu, S. S., Lin, C. W., Chang, P. Z., & Shih, W. P. (2009). Fabrication process of integrated multi-analyte biochip system for implantable application. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 204-207. 文章 4805354. https://doi.org/10.1109/MEMSYS.2009.4805354

Tsai, YC, Chiu, NF, Liu, PC, Ou, YC, Liao, HH, Yang, YJ, Yang, LJ, Lei, U, Chao, FS, Lu, SS, Lin, CW, Chang, PZ & Shih, WP 2009, 'Fabrication process of integrated multi-analyte biochip system for implantable application', Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 頁 204-207. https://doi.org/10.1109/MEMSYS.2009.4805354

@article{e240c4f5c7a54002a16b6b4479536956,

title = "Fabrication process of integrated multi-analyte biochip system for implantable application",

abstract = "This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.",

author = "Tsai, \{Y. C.\} and Chiu, \{N. F.\} and Liu, \{P. C.\} and Ou, \{Y. C.\} and Liao, \{H. H.\} and Yang, \{Y. J.\} and Yang, \{L. J.\} and U. Lei and Chao, \{F. S.\} and Lu, \{S. S.\} and Lin, \{C. W.\} and Chang, \{P. Z.\} and Shih, \{W. P.\}",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805354",

language = "English",

pages = "204--207",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

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AU - Tsai, Y. C.

AU - Chiu, N. F.

AU - Liu, P. C.

AU - Ou, Y. C.

AU - Liao, H. H.

AU - Yang, Y. J.

AU - Yang, L. J.

AU - Lei, U.

AU - Chao, F. S.

AU - Lu, S. S.

AU - Lin, C. W.

AU - Chang, P. Z.

AU - Shih, W. P.

PY - 2009

Y1 - 2009

N2 - This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

AB - This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

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M3 - Conference article

AN - SCOPUS:65949107348

SN - 1084-6999

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EP - 207

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - 4805354

T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

ER -

Fabrication process of integrated multi-analyte biochip system for implantable application

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