Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai; N. F. Chiu; P. C. Liu; Y. C. Ou; H. H. Liao; Y. J. Yang; L. J. Yang; U. Lei; F. S. Chao; S. S. Lu; C. W. Lin; P. Z. Chang; W. P. Shih

doi:10.1109/MEMSYS.2009.4805354

Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai^*, N. F. Chiu, P. C. Liu, Y. C. Ou, H. H. Liao, Y. J. Yang, L. J. Yang, U. Lei, F. S. Chao, S. S. Lu, C. W. Lin, P. Z. Chang, W. P. Shih

^*此作品的通信作者

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

6 引文斯高帕斯（Scopus）

摘要

This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

原文	英語
文章編號	4805354
頁（從 - 到）	204-207
頁數	4
期刊	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805354
出版狀態	已發佈 - 2009
對外發佈	是
事件	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, 意大利持續時間: 2009 1月 25 → 2009 1月 29

ASJC Scopus subject areas

電子、光磁材料
凝聚態物理學
機械工業
電氣與電子工程

存取文件

10.1109/MEMSYS.2009.4805354

其它文件與鏈接

引用此

Tsai, Y. C., Chiu, N. F., Liu, P. C., Ou, Y. C., Liao, H. H., Yang, Y. J., Yang, L. J., Lei, U., Chao, F. S., Lu, S. S., Lin, C. W., Chang, P. Z., & Shih, W. P. (2009). Fabrication process of integrated multi-analyte biochip system for implantable application. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 204-207. [4805354]. https://doi.org/10.1109/MEMSYS.2009.4805354

Tsai, YC, Chiu, NF, Liu, PC, Ou, YC, Liao, HH, Yang, YJ, Yang, LJ, Lei, U, Chao, FS, Lu, SS, Lin, CW, Chang, PZ & Shih, WP 2009, 'Fabrication process of integrated multi-analyte biochip system for implantable application', Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 頁 204-207. https://doi.org/10.1109/MEMSYS.2009.4805354

@article{e240c4f5c7a54002a16b6b4479536956,

title = "Fabrication process of integrated multi-analyte biochip system for implantable application",

abstract = "This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.",

author = "Tsai, {Y. C.} and Chiu, {N. F.} and Liu, {P. C.} and Ou, {Y. C.} and Liao, {H. H.} and Yang, {Y. J.} and Yang, {L. J.} and U. Lei and Chao, {F. S.} and Lu, {S. S.} and Lin, {C. W.} and Chang, {P. Z.} and Shih, {W. P.}",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805354",

language = "English",

pages = "204--207",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

}

TY - JOUR

T1 - Fabrication process of integrated multi-analyte biochip system for implantable application

AU - Tsai, Y. C.

AU - Chiu, N. F.

AU - Liu, P. C.

AU - Ou, Y. C.

AU - Liao, H. H.

AU - Yang, Y. J.

AU - Yang, L. J.

AU - Lei, U.

AU - Chao, F. S.

AU - Lu, S. S.

AU - Lin, C. W.

AU - Chang, P. Z.

AU - Shih, W. P.

PY - 2009

Y1 - 2009

N2 - This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

AB - This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

UR - http://www.scopus.com/inward/record.url?scp=65949107348&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65949107348&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2009.4805354

DO - 10.1109/MEMSYS.2009.4805354

M3 - Conference article

AN - SCOPUS:65949107348

SN - 1084-6999

SP - 204

EP - 207

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - 4805354

T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

ER -

Fabrication process of integrated multi-analyte biochip system for implantable application

摘要

ASJC Scopus subject areas

存取文件

其它文件與鏈接

指紋

引用此