Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai*, N. F. Chiu, P. C. Liu, Y. C. Ou, H. H. Liao, Y. J. Yang, L. J. Yang, U. Lei, F. S. Chao, S. S. Lu, C. W. Lin, P. Z. Chang, W. P. Shih

*此作品的通信作者

研究成果: 雜誌貢獻會議論文同行評審

5 引文 斯高帕斯(Scopus)

摘要

This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

原文英語
文章編號4805354
頁(從 - 到)204-207
頁數4
期刊Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
出版狀態已發佈 - 2009 六月 1
對外發佈
事件22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, 意大利
持續時間: 2009 一月 252009 一月 29

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 機械工業
  • 電氣與電子工程

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