Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai, N. F. Chiu, P. C. Liu, Y. C. Ou, H. H. Liao, Y. J. Yang, L. J. Yang, U. Lei, F. S. Chao, S. S. Lu, C. W. Lin, P. Z. Chang, W. P. Shih

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    5 引文 斯高帕斯(Scopus)

    摘要

    This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

    原文英語
    文章編號4805354
    頁(從 - 到)204-207
    頁數4
    期刊Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    DOIs
    出版狀態已發佈 - 2009 六月 1
    事件22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, 意大利
    持續時間: 2009 一月 252009 一月 29

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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