Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

Ya Wen Su; Cen Shawn Wu; Chia Chun Chen; Chii Dong Chen

doi:10.1002/adma.200390008

Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

Ya Wen Su^*, Cen Shawn Wu, Chia Chun Chen, Chii Dong Chen

^*此作品的通信作者

化學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

63 引文斯高帕斯（Scopus）

摘要

A simple, unique and low cost method for fabricating 2D arrays of cadmium selenide pillars is demonstrated. Electrochemical deposition and e-beam lithography techniques are combined in this method. The molar ratio of the electrolytes and the deposition rate are the key factors that determine the quality of the films and its stoichiometry. The technique can be used to make any optical element or any 2 D array pattern.

原文	英語
頁（從 - 到）	49-51
頁數	3
期刊	Advanced Materials
卷	15
發行號	1
DOIs	https://doi.org/10.1002/adma.200390008
出版狀態	已發佈 - 2003 1月 3

ASJC Scopus subject areas

一般材料科學
材料力學
機械工業

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10.1002/adma.200390008

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Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

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