Fabrication of silicon nanopillars array for developing PCs sensor

Mao Jung Huang*, Chii Rong Yang, Chien Ying Su, Ming Hua Shiao

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

摘要

This study proposed the use of combined nano-sphere lithography (NSL) and photo-assisted electrochemical etching (PAECE) to generate arrayed nano-pillar with high aspect ratio on silicon wafer, and then used for the application of photonic crystals (PCs) Sensor. The experiment result indicates the NSL can conveniently define nano-array and PAECE technique can effectively yield nano-pores and nano-pillars. The nano-pore, depth of 2.3 μm and diameter of 90 nm, was generated by 1 V PAECE. When the bias of PAECE was enlarged to 2.2 V, nano-pillar array was produced with 2 μm in height, 100 nm in diameter and 201 for aspect ratio. The PCs sensor detection platform was composed by laser of 1550 nm, precision translation stage and polarimeter. Through this high sensitive system, we can examine the small bio-molecules of plasmid by means of the polarized variation represented in Poincarè sphere coordinate system.

原文英語
主出版物標題8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
頁面237-241
頁數5
DOIs
出版狀態已發佈 - 2013
事件8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, 中国
持續時間: 2013 四月 72013 四月 10

出版系列

名字8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

其他

其他8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
國家/地區中国
城市Suzhou
期間2013/04/072013/04/10

ASJC Scopus subject areas

  • 生物化學、遺傳與分子生物學(雜項)
  • 生物技術

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