Fabrication of micro-hole arrays using precision filled wax metal deposition

Shun Tong Chen*, Tsu Sheng Luo

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

12 引文 斯高帕斯(Scopus)

摘要

This study presents a low-cost hybrid fabrication process that produces micro-holes of less than 200 μm in diameter. First of all, a micro-EDM hole-drilling is employed to perforate micro-holes through the mirror-like substrate (SUS304), which is cylindrical in shape. The oily wax also known as "sacrificial material" is extruded and formed onto the SUS304 substrate, resulting in a precision cylindrical micro-wax pillar mould. A precision electroforming is then conducted to deposit a thick nickel metal layer onto the substrate, and subsequently the wax mould is completely removed and revealed a perforated micro-hole array after releasing from the substrate. Experimental results show that the wax mould has an excellent duplication capability. The finished micro-hole array has an average hole-diameter of 165.3 μm and demonstrates ideal geometric accuracy. The proposed approach can significantly cost down and contribute to the precision machining industry.

原文英語
頁(從 - 到)504-509
頁數6
期刊Journal of Materials Processing Technology
210
發行號3
DOIs
出版狀態已發佈 - 2010 二月 1

ASJC Scopus subject areas

  • 陶瓷和複合材料
  • 電腦科學應用
  • 金屬和合金
  • 工業與製造工程

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