Fabrication and analysis of microfluidic mold insert by micro electrical discharge machining

Jeou Long Lee, Yung Kang Shen, Yi Lin, Ping Tun Teng, Chuan Min Huang

研究成果: 書貢獻/報告類型會議貢獻

2 引文 斯高帕斯(Scopus)

摘要

This study develops an improved method for generating aluminum mold inserts used in the replication of polymer-based microfluidic chip. Since molding masters that are suitable for microfluidic chip replication must have features whose dimensions are of the order of tens to hundreds of microns, micro electrical discharge machining is employed herein to fabricate an aluminum mold insert of a microfluidic chip. The width and depth of the aluminum mold insert for the microfluidic chip are 61.50 μm and 49.61 μm, respectively. The surface roughness values of the microchannel and the sample reservoir in aluminum mold insert for the microfluidic chip are 59.92 nm and 34.34 nm, respectively. PMMA material is adopted as the molded microfluidic chip that is produced by micro-hot embossing molding. The PMMA material can replicate the microchannel and sample reservoir very well when the aluminum mold insert is used in micro-hot embossing molding. The results indicate that the most important parameter in the replication of molded microfluidic chip is the embossing pressure, which is also the most important parameter in determining the surface roughness of the molded microfluidic chip.

原文英語
主出版物標題4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
頁面941-945
頁數5
DOIs
出版狀態已發佈 - 2009 十月 12
事件4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, 中国
持續時間: 2009 一月 52009 一月 8

出版系列

名字4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

其他

其他4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
國家中国
城市Shenzhen
期間09/1/509/1/8

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • 引用此

    Lee, J. L., Shen, Y. K., Lin, Y., Teng, P. T., & Huang, C. M. (2009). Fabrication and analysis of microfluidic mold insert by micro electrical discharge machining. 於 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (頁 941-945). [5068729] (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068729