Evaluation and selection of materials for particulate matter MEMS sensors by using hybrid MCDM methods

Chi Yo Huang, Pei Han Chung, Joseph Z. Shyu, Yao-Hua Ho, Chao Hsin Wu, Ming Che Lee, Ming-Jenn Wu

研究成果: 雜誌貢獻文章同行評審

5 引文 斯高帕斯(Scopus)

摘要

Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable devices; however, traditional micro-electro-mechanical systems (MEMS) gas sensors are too large. To overcome this challenge, experts from industry and academia have recently begun to investigate replacing the traditional etching techniques used on MEMS with semiconductor-based manufacturing processes and materials, such as gallium nitride (GaN), gallium arsenide (GaAs), and silicon. However, studies showing how to systematically evaluate and select suitable materials are rare in the literature. Therefore, this study aims to propose an analytic framework based on multiple criteria decision making (MCDM) to evaluate and select the most suitable materials for fabricating PM sensors. An empirical study based on recent research was conducted to demonstrate the feasibility of our analytic framework. The results provide an invaluable future reference for research institutes and providers.

原文英語
文章編號3451
期刊Sustainability (Switzerland)
10
發行號10
DOIs
出版狀態已發佈 - 2018 九月 27

ASJC Scopus subject areas

  • Geography, Planning and Development
  • Management, Monitoring, Policy and Law
  • Renewable Energy, Sustainability and the Environment

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