Effects of thickness on the properties of indium-doped zinc oxide films

Chia Ching Wu, Chien Chen Diao, Chih Chin Yang, Yi Chieh Chao, Chin Guo Kuo, Cheng Fu Yang

研究成果: 書貢獻/報告類型會議論文篇章

摘要

In this study, radio frequency magnetron sputtering was used to deposit indium-doped zinc oxide (IZO) films with varying deposition time on glass substrates. The structural, optical, and resistivity properties of IZO films were investigated with field emission scanning electron microscope, X-ray diffraction patterns, UV–visible spectroscopy, and Hall-effect analysis. XRD analysis on IZO films showed that only the (002) diffraction peak was observable, indicating that the IZO films showed a good c-axis orientation perpendicular to the glass substrates. As the deposition time of IZO films increased from 30 to 90 min, the thickness increased from 237 to 389 nm, the grain size increased from 12.3 to 87.6 nm, and the resistivity decreased from 9.08 9 10-3 to 2.85 9 10-3 X-cm. The transmittance was found to slightly decrease with the increasing thickness of IZO films.

原文英語
主出版物標題Proceedings of the 2nd International Conference on Intelligent Technologies and Engineering Systems, ICITES 2013
編輯Cheng-Yi Chen, Cheng-Fu Yang, Jengnan Juang
發行者Springer Verlag
頁面187-194
頁數8
ISBN(電子)9783319045726
DOIs
出版狀態已發佈 - 2014
事件2nd International Conference on Intelligent Technologies and Engineering Systems, ICITES 2013 - Kaohsiung, 臺灣
持續時間: 2013 十二月 122013 十二月 14

出版系列

名字Lecture Notes in Electrical Engineering
293
ISSN(列印)1876-1100
ISSN(電子)1876-1119

其他

其他2nd International Conference on Intelligent Technologies and Engineering Systems, ICITES 2013
國家臺灣
城市Kaohsiung
期間2013/12/122013/12/14

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

指紋 深入研究「Effects of thickness on the properties of indium-doped zinc oxide films」主題。共同形成了獨特的指紋。

引用此