Effects of post annealing temperatures on the properties of Sr 0.6Ba0.4Nb2O6 thin films

Cheng Fu Yang, Chin Guo Kuo, Tai Ping Sun, Sung Mao Wu, Wen Ray Chen

研究成果: 書貢獻/報告類型會議論文篇章

摘要

Sr0.6Ba0.4Nb2O6 (SBN) thin films were deposited using radio frequency (RF) magnetron sputtering method and post annealing in a conventional furnace. The annealing process had improved the crystallization and also had large influences on the crystalline orientation. As the annealing temperature increased from 600°C to 700 °C, the diffraction intensities of (410) and (001) planes increased. Annealed at 800°C, the SBN thin films showed highly c-axis crystalline orientation of (001) plane. The influences of annealing temperatures on the electrical characteristics of the polarization-applied electric field curves, the capacitance-voltage curves, and the leakage current density-electric field curves were investigated.

原文英語
主出版物標題4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
出版狀態已發佈 - 2011 九月 26
事件4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, 臺灣
持續時間: 2011 六月 212011 六月 24

出版系列

名字Proceedings - International NanoElectronics Conference, INEC
ISSN(列印)2159-3523

其他

其他4th IEEE International Nanoelectronics Conference, INEC 2011
國家/地區臺灣
城市Tao-Yuan
期間2011/06/212011/06/24

ASJC Scopus subject areas

  • 電氣與電子工程

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