Effect of acid etching durations on surface roughness and residual stresses of lightweight glass ceramic

Chia Yen Chan, Yi Cheng Chen, Chii Rong Yang, Ting Ming Huang

研究成果: 書貢獻/報告類型會議貢獻

摘要

The present study is aimed at investigating the effect of acid etching durations on the surface roughness and birefringence of lightweight mirrors made of ZERODUR® glass ceramic. Four acid etching durations (15, 20, 25 and 30 min) have been chosen at a fixed concentration. By using the photoelasticity, surface profiler and laser microscope, the results before and after acid etching have been obtained. It is found the maximum value of the retardation for the polished lightweight ZERODUR® mirror is up to 30 nm. In addition, residual stresses induced by the grinding process with an average grain size of 149 μm are relived after removing ZERODUR® material of a thickness of 60 μm.

原文英語
主出版物標題Innovation for Applied Science and Technology
頁面77-82
頁數6
DOIs
出版狀態已發佈 - 2013 二月 20
事件2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, 臺灣
持續時間: 2012 十一月 22012 十一月 6

出版系列

名字Applied Mechanics and Materials
284-287
ISSN(列印)1660-9336
ISSN(電子)1662-7482

其他

其他2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
國家臺灣
城市Kaohsiung
期間12/11/212/11/6

ASJC Scopus subject areas

  • Engineering(all)

指紋 深入研究「Effect of acid etching durations on surface roughness and residual stresses of lightweight glass ceramic」主題。共同形成了獨特的指紋。

  • 引用此

    Chan, C. Y., Chen, Y. C., Yang, C. R., & Huang, T. M. (2013). Effect of acid etching durations on surface roughness and residual stresses of lightweight glass ceramic. 於 Innovation for Applied Science and Technology (頁 77-82). (Applied Mechanics and Materials; 卷 284-287). https://doi.org/10.4028/www.scientific.net/AMM.284-287.77