Dual-crankshaft out-of-phase balanced drive mechanism applied to high-frequency scraping of high-density microcavities patterns

Shun Tong Chen*, Wei Yu Jhou

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

2 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds

Business & Economics