TY - JOUR
T1 - Dual-axis maglev guiding system modeling and controller design for wafer transportation
AU - Chen, Mei Yung
AU - Wang, Ming Jyh
AU - Fu, Li Chen
PY - 1999
Y1 - 1999
N2 - In this paper, we extend our previous result on designing a single-axis maglev guiding system into a more involved work of designing a dual-axis positioning system. First of all, important issues on how to construct the mechanism of the dual-axis positioning system are addressed. Then, the dynamics of the dual-axis maglev guiding system are analyzed. According to the derived analytic model, which is subject to unknown system parameters, an adaptive controller that can control the wafer carrier at the desired target point of each axis with full alignment is developed. From the simulation results, good performance of regulation for guiding-axis and of tracking for positioning-axis is achieved.
AB - In this paper, we extend our previous result on designing a single-axis maglev guiding system into a more involved work of designing a dual-axis positioning system. First of all, important issues on how to construct the mechanism of the dual-axis positioning system are addressed. Then, the dynamics of the dual-axis maglev guiding system are analyzed. According to the derived analytic model, which is subject to unknown system parameters, an adaptive controller that can control the wafer carrier at the desired target point of each axis with full alignment is developed. From the simulation results, good performance of regulation for guiding-axis and of tracking for positioning-axis is achieved.
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M3 - Conference article
AN - SCOPUS:0033333484
VL - 3
SP - 2623
EP - 2628
JO - Proceedings of the IEEE Conference on Decision and Control
JF - Proceedings of the IEEE Conference on Decision and Control
SN - 0191-2216
T2 - The 38th IEEE Conference on Decision and Control (CDC)
Y2 - 7 December 1999 through 10 December 1999
ER -