Dual-axis maglev guiding system modeling and controller design for wafer transportation

Mei Yung Chen*, Ming Jyh Wang, Li Chen Fu

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)

摘要

In this paper, we extend our previous result on designing a single-axis maglev guiding system into a more involved work of designing a dual-axis positioning system. First of all, important issues on how to construct the mechanism of the dual-axis positioning system are addressed. Then, the dynamics of the dual-axis maglev guiding system are analyzed. According to the derived analytic model, which is subject to unknown system parameters, an adaptive controller that can control the wafer carrier at the desired target point of each axis with full alignment is developed. From the simulation results, good performance of regulation for guiding-axis and of tracking for positioning-axis is achieved.

原文英語
頁(從 - 到)2623-2628
頁數6
期刊Proceedings of the IEEE Conference on Decision and Control
3
出版狀態已發佈 - 1999
對外發佈

ASJC Scopus subject areas

  • 化學健康與安全
  • 控制與系統工程
  • 安全、風險、可靠性和品質

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