Double nitridation of crystalline ZrO 2 /Al 2 O 3 buffer gate stack with high capacitance, low leakage and improved thermal stability

Jhih Jie Huang, Yi Jen Tsai, Meng Chen Tsai, Min Hung Lee, Miin Jang Chen

研究成果: 雜誌貢獻期刊論文同行評審

8 引文 斯高帕斯(Scopus)

指紋

深入研究「Double nitridation of crystalline ZrO <sub>2</sub> /Al <sub>2</sub> O <sub>3</sub> buffer gate stack with high capacitance, low leakage and improved thermal stability」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds