Double Layers Omega FETs with Ferroelectric HfZrO2 for One-Transistor Memory

K. T. Chen, C. Lo, Y. Y. Lin, C. Y. Chueh, C. Chang, G. Y. Siang, Y. Y. Tseng, Y. J. Yang, F. C. Hsieh, S. H. Chang, H. Liang, S. H. Chiang, J. H. Liu, Y. Y. Lin, P. C. Yeh, C. Y. Wang, H. Y. Yang, P. J. Tzeng, M. H. Liao, S. T. ChangY. Y. Tseng, M. H. Lee

研究成果: 書貢獻/報告類型會議貢獻

摘要

The 3D double layer Ω-type FETs with ferroelectric HfZrO2 gate served for one-transistor (1T) architecture is demonstrated and studied for memory reliability. The high endurance is presented more than 106 cycles P/E with 4V. Multi-domain model integrated with TCAD is proposed by adding a coupling coefficient for the polarization gradient term of the free energy, and calculating for nanosheet GAA-FETs. The polarization orientation is assigned randomly by Gaussian distribution into individual domain for multi-dimensional 3D device simulation. The data retention is degraded due to depolarization field occurrence at the corner by modeling results. The feasible structure paves the candidate for emerging memory applications.

原文英語
主出版物標題2020 IEEE International Reliability Physics Symposium, IRPS 2020 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781728131993
DOIs
出版狀態已發佈 - 2020 四月
事件2020 IEEE International Reliability Physics Symposium, IRPS 2020 - Virtual, Online, 美国
持續時間: 2020 四月 282020 五月 30

出版系列

名字IEEE International Reliability Physics Symposium Proceedings
2020-April
ISSN(列印)1541-7026

會議

會議2020 IEEE International Reliability Physics Symposium, IRPS 2020
國家美国
城市Virtual, Online
期間20/4/2820/5/30

ASJC Scopus subject areas

  • Engineering(all)

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  • 引用此

    Chen, K. T., Lo, C., Lin, Y. Y., Chueh, C. Y., Chang, C., Siang, G. Y., Tseng, Y. Y., Yang, Y. J., Hsieh, F. C., Chang, S. H., Liang, H., Chiang, S. H., Liu, J. H., Lin, Y. Y., Yeh, P. C., Wang, C. Y., Yang, H. Y., Tzeng, P. J., Liao, M. H., ... Lee, M. H. (2020). Double Layers Omega FETs with Ferroelectric HfZrO2 for One-Transistor Memory. 於 2020 IEEE International Reliability Physics Symposium, IRPS 2020 - Proceedings [9129088] (IEEE International Reliability Physics Symposium Proceedings; 卷 2020-April). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IRPS45951.2020.9129088