摘要
The standard steps of P- implantation and silicide block in the complementary metal-oxide semiconductor (CMOS) process are used in this design to implement the proposed diode string. The novel diode string realized by the diodes of P+ with N-well (P+/NW) and P- with N+ (P-/N+) is proposed in this letter. Besides, two diodes are merged together to form a silicon-controlled rectifier path to reduce the clamping voltage during electrostatic discharge (ESD) stress. The test devices of prior and proposed diode strings have been compared in a 0.18 μm CMOS process. With the higher current-handling ability and lower clamping voltage, the proposed diode string can be used as the efficient on-chip ESD protection device.
原文 | 英語 |
---|---|
文章編號 | 7588053 |
頁(從 - 到) | 688-690 |
頁數 | 3 |
期刊 | IEEE Transactions on Device and Materials Reliability |
卷 | 16 |
發行號 | 4 |
DOIs | |
出版狀態 | 已發佈 - 2016 12月 |
ASJC Scopus subject areas
- 電子、光磁材料
- 安全、風險、可靠性和品質
- 電氣與電子工程