Digital holographic imaging for optical inspection in learning-based pattern classification

Han Yen Tu, Kuang Che Chang Chien, Chau Jern Cheng

研究成果: 書貢獻/報告類型會議貢獻

摘要

High demand of optical inspection is increased to guarantee manufacture and product quality in industries. To overcome limitations of the manual defect inspection, machine vision inspection is needed to efficiently and accurately screen the undesired defects on various products. Recently, the transparent substrate is becoming widely used for manufacturing optics and electronics products. For high-grade transparent substrates, development of machine vision inspection has increased its importance for inspecting defects after production. To perform machine vision inspection for the transparent substrate, the exposure procedure and analysis of the capturing image are critical challenges due to its properties of reflection and transparency. However, conventional machine vision systems are performed for optical inspection based on two-dimensional (2D) intensity images from the camera-based photography without phase and depth information, and may decrease inspection accuracy as well as defect classification. Conversely, instead of the 2D intensity image by camera-based photography with complicated algorithms and time-consuming computation, digital holography is a novel three-dimensional (3D) imaging technique to rapidly access the whole wavefront information of the target sample for optical inspection and complex defect analysis. In this study, we propose digital holographic imaging of transparent target sample for optical inspection in learning-based pattern classification, which a novel complex defect inspection model is presented for multiple defects identification of the transparent substrate based on 3D diffraction characteristics and machine learning algorithm. Both theoretical and experimental results will be presented and analyzed to verify the effective inspection and high accuracy.

原文英語
主出版物標題Optical Measurement Systems for Industrial Inspection XI
編輯Peter Lehmann, Wolfgang Osten, Armando Albertazzi Goncalves
發行者SPIE
ISBN(電子)9781510627918
DOIs
出版狀態已發佈 - 2019 一月 1
事件Optical Measurement Systems for Industrial Inspection XI 2019 - Munich, 德国
持續時間: 2019 六月 242019 六月 27

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
11056
ISSN(列印)0277-786X
ISSN(電子)1996-756X

會議

會議Optical Measurement Systems for Industrial Inspection XI 2019
國家德国
城市Munich
期間19/6/2419/6/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • 引用此

    Tu, H. Y., Chang Chien, K. C., & Cheng, C. J. (2019). Digital holographic imaging for optical inspection in learning-based pattern classification. 於 P. Lehmann, W. Osten, & A. A. Goncalves (編輯), Optical Measurement Systems for Industrial Inspection XI [1105606] (Proceedings of SPIE - The International Society for Optical Engineering; 卷 11056). SPIE. https://doi.org/10.1117/12.2525946