TY - GEN
T1 - Development of new micro gas preconcentrator using novel electroless gold plating process
AU - Kuo, C. Y.
AU - Chen, P. S.
AU - Chiu, K. J.
AU - Lu, C. J.
AU - Tian, W. C.
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/8/5
Y1 - 2015/8/5
N2 - This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.
AB - This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.
KW - electroless gold plating
KW - micro gas chromatography (μGC)
KW - micro gas preconcentrator (μPCT)
UR - http://www.scopus.com/inward/record.url?scp=84955510171&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84955510171&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2015.7181209
DO - 10.1109/TRANSDUCERS.2015.7181209
M3 - Conference contribution
AN - SCOPUS:84955510171
T3 - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
SP - 1456
EP - 1459
BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Y2 - 21 June 2015 through 25 June 2015
ER -