Development of new micro gas preconcentrator using novel electroless gold plating process

C. Y. Kuo, P. S. Chen, K. J. Chiu, C. J. Lu, W. C. Tian

研究成果: 書貢獻/報告類型會議貢獻

摘要

This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.

原文英語
主出版物標題2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1456-1459
頁數4
ISBN(電子)9781479989553
DOIs
出版狀態已發佈 - 2015 八月 5
事件18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, 美国
持續時間: 2015 六月 212015 六月 25

出版系列

名字2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

會議

會議18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
國家美国
城市Anchorage
期間15/6/2115/6/25

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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  • 引用此

    Kuo, C. Y., Chen, P. S., Chiu, K. J., Lu, C. J., & Tian, W. C. (2015). Development of new micro gas preconcentrator using novel electroless gold plating process. 於 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (頁 1456-1459). [7181209] (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181209