Development of a novel micropreconcentrator for micro gas chromatography

W. C. Tian, H. J. Sheen, T. H. Wu, Chia-Jung Lu, W. R. Chen, T. Y. Wei

研究成果: 書貢獻/報告類型會議貢獻

摘要

A novel micropreconcentrator using a simple one-photomask micromachined process is presented. Instead of using E-beam evaporation to deposit metal wires for heaters of micropreconcentrators, a chemical reaction using microfluidic laminar flow patterning was utilized to deposit metal wires as microheater for micropreconcentrators. Metal deposition using this laminar flow patterning technique provides higher deposition rate and easier microfabrication compared to conventional micromachined technologies. In addition to this laminar flow patterning for microheaters, a unique integrated adsorbent forming technique was developed. The aqueous carbohydrate, serving as adsorbents, was filled into the micropreconcentrator and carbonized at a high temperature. The micropreconcentrator can be heated up to 300°C rapidly by applying a constant electrical power of ∼1 W and a heating rate of 10°C/s. Four volatile organic compounds, acetone, benzene, toluene and xylene, were collected through our novel micropreconcentrators and separated by a 17m long gas chromatography column successfully. The peak width at half height (PWHH) of these four compounds were quite narrow (<1.17s) and the minimum PWHH of 0.72s was obtained using acetone.

原文英語
主出版物標題2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
頁面2094-2097
頁數4
DOIs
出版狀態已發佈 - 2011 九月 1
事件2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, 中国
持續時間: 2011 六月 52011 六月 9

出版系列

名字2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

其他

其他2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
國家中国
城市Beijing
期間11/6/511/6/9

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • 引用此

    Tian, W. C., Sheen, H. J., Wu, T. H., Lu, C-J., Chen, W. R., & Wei, T. Y. (2011). Development of a novel micropreconcentrator for micro gas chromatography. 於 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (頁 2094-2097). [5969277] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969277