Development of a large scanning-range atomic force microscope with adaptive complementary sliding mode controller

Kuan Chia Huang, Jim Wei Wu, Jyun Jhih Chen, Chih Lieh Chen, Mei Yung Chen, Li Chen Fu

研究成果: 雜誌貢獻Conference article同行評審

3 引文 斯高帕斯(Scopus)

摘要

Atomic force microscopy (AFM) is a powerful technique to provide high resolution, three-dimensional data for measuring topography of samples. However, the scanning range of conventional AFM systems hardly exceeds hundreds of micrometers due to the piezoelectric actuation. In this research, we develop a large scanning-range AFM system with a z-scanner separated from the xy-scanner. The z-scanner actuated by piezoelectric stack provides high speed scanning and the homemade xy-scanner actuated by electromagnetic actuation is capable of 2 mm×2 mm large field positioning with 17 nm rms error. The overall AFM system consists of a commercial piezoelectric positioner, four sets of electromagnetic actuator, a monolithic parallel compliant mechanism, and an eddy current damper. Moreover, a compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is applied to measure the amplitude of the cantilever. Furthermore, we design an adaptive complementary sliding mode controller to deal with the unknown parameters, unmodeled system uncertainties, and the external disturbances. Finally, preliminary experimental results demonstrate the capability of the proposed system.

原文英語
文章編號6426057
頁(從 - 到)1685-1690
頁數6
期刊Proceedings of the IEEE Conference on Decision and Control
DOIs
出版狀態已發佈 - 2012 十二月 1
事件51st IEEE Conference on Decision and Control, CDC 2012 - Maui, HI, 美国
持續時間: 2012 十二月 102012 十二月 13

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Modelling and Simulation
  • Control and Optimization

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